Semiconductor automation originates from the prevention and avoidance of frauds in daily fab operations. As semiconductor technology and business continuously advance and grow, manufacturing systems must aggressively evolve to meet the changing technical and business requirements in this industry. Semiconductor manufacturing has been suffering pains from islands of automation.
The problems associated with these systems are limited flexibility and functionality, low level of integration, and high cost of ownership. Thanks to the recent technological advances that can provide significant approaches in dealing with these problems, we are able to realize the promise of semiconductor manufacturing with sound automation and integration.